Novel illumination system for EUVL - SPIE Digital Library

Then this system adopts Koehler illumination. It is necessary for scanner illumination systems to have means for minute adjustments of its properties (e.g. ... SignIn ViewCart Help EmailorUsername Forgotyourusername? Password Forgotyourpassword? Show Keepmesignedin Pleasewait... NoSPIEaccount?Createanaccount InstitutionalAccess:Signinwithyourinstitutionalcredentials TranslatorDisclaimer Youhaverequestedamachinetranslationofselectedcontentfromourdatabases.Thisfunctionalityisprovidedsolelyforyourconvenienceandisinnowayintendedtoreplacehumantranslation.NeitherSPIEnortheownersandpublishersofthecontentmake,andtheyexplicitlydisclaim,anyexpressorimpliedrepresentationsorwarrantiesofanykind,including,withoutlimitation,representationsandwarrantiesastothefunctionalityofthetranslationfeatureortheaccuracyorcompletenessofthetranslations. Translationsarenotretainedinoursystem.YouruseofthisfeatureandthetranslationsissubjecttoalluserestrictionscontainedintheTermsandConditionsofUseoftheSPIEwebsite. 21July2000 NovelilluminationsystemforEUVL HidekiKomatsuda AuthorAffiliations+ HidekiKomatsuda1 1NikonCorp.(Japan) ProceedingsVolume3997,EmergingLithographicTechnologiesIV;(2000)https://doi.org/10.1117/12.390117Event:Microlithography2000,2000,SantaClara,CA,UnitedStates ARTICLE CITEDBY DOWNLOADPAPER SAVETOMYLIBRARY PERSONALSIGNIN Fullaccessmaybeavailablewithyoursubscription EmailorUsername Forgotyourusername? Password Forgotyourpassword? Show Keepmesignedin NoSPIEaccount?Createanaccount InstitutionalAccess:Signinwithyourinstitutionalcredentials PURCHASETHISCONTENT SUBSCRIBETODIGITALLIBRARY 50downloadsper1-yearsubscription Members:$195 Non-members:$335 ADDTOCART 25downloadsper1-yearsubscription Members:$145 Non-members:$250 ADDTOCART PURCHASESINGLEARTICLE IncludesPDF,HTML&Video,whenavailable Members: Non-members: ADDTOCART Thiswillcountasoneofyourdownloads. Youwillhaveaccesstoboththepresentationandarticle(ifavailable). DOWNLOADNOW Thiscontentisavailablefordownloadviayourinstitution'ssubscription.Toaccessthisitem,pleasesignintoyourpersonalaccount. EmailorUsername Forgotyourusername? Password Forgotyourpassword? Show Keepmesignedin NoSPIEaccount?Createanaccount MyLibrary Youcurrentlydonothaveanyfolderstosaveyourpaperto!Createanewfolderbelow. CreateNewFolder SAVE> FolderName FolderDescription SAVE Abstract Aconceptforanovelarc-field,illuminationprojectionsystem,particularlyforEUVLapplications,ispresented.Thissystemconsistsofalightsource,acollector,afly-eye,andacondenser.Thefly-eyehastworeflectors.Oneofthemisconstructedwithusingarc-shaped,concavemirrorelements,theotherusingmanyrectangular,concavemirrorelements.Bothelementsarearrangedcloselysidebyside.Allofthearc-shapedmirrorshaveacorrespondingrectangularmirroronaone-to-onebasis.Eachrectangularmirrorprojectsitscorrespondingarc-shapedmirror'simagesontoanarcprojectionfieldonthemask.Asaconsequence,allofincidentraysonfly-eyereflectorconstructedbyarc-shapemirrorelementsaregatheredinthearcprojectionfield.Currently,themaintypeofilluminationsystemforEUVLisbasedonso-called'Koehler-criticalillumination,'whichisnotnecessarilyproperforascannersystem.ThenthissystemadoptsKoehlerillumination.Itisnecessaryforscannerilluminationsystemstohavemeansforminuteadjustmentsofitsproperties(e.g.irradiancedistribution).Suchadjustmentsmeansarepresented. ©(2000)COPYRIGHTSocietyofPhoto-OpticalInstrumentationEngineers(SPIE).Downloadingoftheabstractispermittedforpersonaluseonly. Citation DownloadCitation HidekiKomatsuda "NovelilluminationsystemforEUVL",Proc.SPIE3997,EmergingLithographicTechnologiesIV,(21July2000);https://doi.org/10.1117/12.390117 ACCESSTHEFULLARTICLE PERSONALSIGNIN Fullaccessmaybeavailablewithyoursubscription EmailorUsername Forgotyourusername? Password Forgotyourpassword? Show Keepmesignedin NoSPIEaccount?Createanaccount InstitutionalAccess:Signinwithyourinstitutionalcredentials PURCHASETHISCONTENT SUBSCRIBETODIGITALLIBRARY 50downloadsper1-yearsubscription Members:$195 Non-members:$335 ADDTOCART 25downloadsper1-yearsubscription Members:$145 Non-members:$250 ADDTOCART PURCHASESINGLEARTICLE IncludesPDF,HTML&Video,whenavailable Members:$17.00 Non-members:$21.00 ADDTOCART PROCEEDINGS 12PAGES DOWNLOADPAPER SAVETOMYLIBRARY SHARE GETCITATION CITATIONS Citedby11scholarlypublications. ExplorecitationsonLens.org Advertisement Advertisement KEYWORDS Mirrors Lightsources Extremeultravioletlithography Light Reflectors Lithographicillumination Cameras Imagingsystems Raytracing Scanners ShowAllKeywords RELATEDCONTENT Analysisandsuppressionofstraylightinphenologicalnetworkmulti... ProceedingsofSPIE(January162019) AdvancingEUVlithographyoptics(ConferencePresentation) ProceedingsofSPIE(January011900) Volumetricdisplayusingaroofmirrorgridarray ProceedingsofSPIE(February242010) TowardsanactiverealtimeTHzcamerafirstrealization... ProceedingsofSPIE(May042007) NewcompactXenonflashsystemforzoomlensandclose... ProceedingsofSPIE(November251993) MonteCarlocalculationoflightdistributioninanintegratingcavity... ProceedingsofSPIE(June011991) SubscribetoDigitalLibrary ReceiveErratumEmailAlert ErratumEmailAlertsnotifyyouwhenanarticlehasbeenupdatedorthepaperiswithdrawn. VisitMyAccounttomanageyouremailalerts. EmailorUsername Forgotyourusername? Password Forgotyourpassword? 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CLOSE HidekiKomatsuda,"NovelilluminationsystemforEUVL,"Proc.SPIE3997,EmergingLithographicTechnologiesIV,(21July2000);https://doi.org/10.1117/12.390117 Include: CitationOnly Citation&Abstract Format: RIS(Zotero) EndNote BibTex Medlars ProCite RefWorks DOWNLOADCITATION CONFERENCEPROCEEDINGS Papers Presentations Journals AdvancedPhotonics JournalofAppliedRemoteSensing JournalofAstronomicalTelescopes,Instruments,andSystems JournalofBiomedicalOptics JournalofElectronicImaging JournalofMedicalImaging JournalofMicro/Nanopatterning,Materials,andMetrology JournalofNanophotonics JournalofOpticalMicrosystems JournalofPhotonicsforEnergy Neurophotonics OpticalEngineering Ebooks Help| AdvancedSearch> Keywords/Phrases Keywords in AllFields Abstract AuthorName Affiliation DOI/ISSN/ISBN Figure&TableCaptions Keywords Title VolumeTitle Remove AND OR NOT in AllFields Abstract AuthorName Affiliation DOI/ISSN/ISBN Figure&TableCaptions Keywords Title VolumeTitle Remove AND OR NOT in AllFields Abstract AuthorName Affiliation DOI/ISSN/ISBN Figure&TableCaptions Keywords Title VolumeTitle Remove +Addanotherfield SearchIn: Proceedings Volume Journals+ Volume Issue Page AdvancedPhotonics JournalofAppliedRemoteSensing JournalofAstronomicalTelescopesInstrumentsandSystems JournalofBiomedicalOptics JournalofElectronicImaging JournalofMedicalImaging JournalofMicro/Nanolithography,MEMS,andMOEMS JournalofNanophotonics JournalofPhotonicsforEnergy Neurophotonics OpticalEngineering SPIEReviews eBooks+ FieldGuideSeries PressMonograph Spotlight TutorialText OtherPress PublicationYears Range SingleYear ClearForm